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发明名称	METHOD FOR CONTROLLING EXPOSURE
摘要
申请公布号	JPS6323316(A)	申请公布日期	1988.01.30
申请号	JP19870146377	申请日期	1987.06.12
申请人	CANON INC	发明人	YAMAMURA MITSUGI
分类号	H01L21/30;G03F7/20;H01L21/027	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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