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发明名称
SAMPLE CONVEYOR
摘要
申请公布号
JPS6322291(A)
申请公布日期
1988.01.29
申请号
JP19860163644
申请日期
1986.07.14
申请人
HITACHI LTD
发明人
KANAI NORIO;TAMURA NAOYUKI
分类号
H01L21/67;B25J15/00;B25J19/02;B60G17/02;H01L21/68
主分类号
H01L21/67
代理机构
代理人
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地址
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