发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To improve the breakage life of a creep due to the load of a tensile stress generated in a temperature cycle by using a copper alloy for suppressing a recrystallization as a bonding wire of a semiconductor element. CONSTITUTION:A wire material which contains 20-560ppm (hereinafter wt ppm is used) of one or more elements selected from Zr, Hf, Ti, Cr and Mn and 25-250ppm or one or more elements selected from Sb, P, Li, Sn, Pb and Cd or 10-650ppm of one or more elements selected from As, Zn, K, Sr, Mg, Ca and T, and the residue of Cu is used as a wire bonding material in a semiconductor device which uses a wire bonding as the connection of a semiconductor chip. Thus, the semiconductor device which uses a copper wire having a strong creep strength and an excellent bondability with high reliability is obtained.
申请公布号 JPS6321841(A) 申请公布日期 1988.01.29
申请号 JP19860165563 申请日期 1986.07.16
申请人 TOSHIBA CORP 发明人 SATO MICHIO;SUZUKI ISAO;YAMAMORI KAZUHIRO
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址
您可能感兴趣的专利