DEVICE FOR LIQUID PHASE EPITAXY,申请号JP19860166442-传众专利搜索

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发明名称	DEVICE FOR LIQUID PHASE EPITAXY
摘要
申请公布号	JPS6321285(A)	申请公布日期	1988.01.28
申请号	JP19860166442	申请日期	1986.07.15
申请人	NEC CORP	发明人	MURAKAMI TOMOKI
分类号	C30B19/00;H01L21/208	主分类号	C30B19/00
代理机构		代理人
主权项
地址

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