ETCHING OF SEMICONDUCTOR CRYSTAL,申请号JP19860166017-传众专利搜索

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发明名称	ETCHING OF SEMICONDUCTOR CRYSTAL
摘要
申请公布号	JPS6320834(A)	申请公布日期	1988.01.28
申请号	JP19860166017	申请日期	1986.07.15
申请人	TOSHIBA CORP	发明人	SHIMADA NAOHIRO;SHIOZAWA HIDEO;HATAGOSHI GENICHI
分类号	H01S5/00;H01L21/306	主分类号	H01S5/00
代理机构		代理人
主权项
地址

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