| 摘要 |
PURPOSE:To improve products in quality and in productivity by performing automatically positioning of two sheets of semiconductor wafers, thereby employing measures ranging from the first one to eighth one. CONSTITUTION:Employing the following eight measures, relative amounts of position shifts between two semiconductor wafers are automatically calculated and the above measures include: (1) the first one for obtaining image information of respective wafers 11A and 11B through photoelectric transfer means 13A and 13B. (2) and (3) the second and third ones for calculating center position coordinates of the wafers. (4) the fourth one for calculating components of parallel diaplacement amounts toward a reference coordinate. (5) the fifth one for recognizing respective wafer directions after detecting an orientation flat part 12. (6) the sixth one for calculating position coordinate values of the orientation flat part 12. (7) the seventh one for calculating inclination components of respective wafers. (8) the eighth one for calculating relative position correction amounts. Thus, the above positioning improves products in quality as well as in productivity. |
