| 摘要 |
PURPOSE:To prevent the leak-in of the other gas to laser gas and prevent the decrease of the pressure of the laser gas due to the leakout of said gas in an oscillator body to outside by a method wherein a space whose pressure is kept lower than the pressure in said body is provided between said body and an outer case wherein this body is contained. CONSTITUTION:The outer case 9 is so constructed as to completely encircle said body 1, and so adjusted in such a manner that the pressure becomes lower than the gas pressure in said body 1 by means of a pump 12 for exhausting the gass of the space 8 between said case 9 and said body 1. When the gas pressure increases by the generation of leak-in of gas from outside the case 9 and the body 1, the exhaust pump 12 is operated by the first pressure detector 11 until the gas pressure becomes prescribed. When the pressure of the laser gas 5 in said body 1 decreases, it is detected by the second pressure detector 13, injecting a new laser gas to said body 1 from a laser gas bomb 14, and accordingly the laser gas pressure in the body 1 is kept constant. |
