| 摘要 |
PURPOSE:To quickly check a pattern by simultaneously reading out information of a preliminarily stored standard pattern and information indicating a stored optimum condition for check to check the pattern. CONSTITUTION:A rough pattern is generated 3 from a check object pattern, which is picked up 1 and binarized 2 and the corrected 4 rough standard pattern is sent to a position correction setting device 5. A position correcting circuit 6 performs position correction in a set 5 position correction calculating window in accordance with a position correction algorithm. A picture processing control circuit 7 writes information of coordinates or the like of the position correction calculating window as a control parameter. The standard pattern for which this control parameter is written is stored 9. The binary picture of the check pattern is stored in a picture memory 10, and the picture of the standard pattern read out from the device 9 is stored in a picture memory 11. The stored 10, 11 check object pattern and the standard pattern are compared with each other by a deciding circuit 12 to detect defects of the check pattern. |
