PLASMA GUN WITH ADJUSTABLE CATHODE,申请号EP19870108487-传众专利搜索

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发明名称	PLASMA GUN WITH ADJUSTABLE CATHODE
摘要
申请公布号	EP0249238(A3)	申请公布日期	1988.01.27
申请号	EP19870108487	申请日期	1987.06.12
申请人	THE PERKIN-ELMER CORPORATION	发明人	BERNECKI, THOMAS F.;VARLEY, KEVIN J.;RUSCH, WILLIAM P.;KLEIN, JOHN F.;BHANSALI, CHANDRA;WLODARCZYK, JANUSZ
分类号	C23C4/12;H05H1/34;H05H1/36;H05H1/42;(IPC1-7):H05H1/34	主分类号	C23C4/12
代理机构		代理人
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