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经营范围
发明名称
INSPECTION OF DISTRIBUTION OF STANDARD PARTICLES
摘要
申请公布号
JPS6319832(A)
申请公布日期
1988.01.27
申请号
JP19860163848
申请日期
1986.07.14
申请人
OKI ELECTRIC IND CO LTD
发明人
UENO YASUSHI
分类号
H01L21/66;G01N15/00;G01N21/88;G01N21/93;G01N21/956
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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