发明名称 KOMPOSITION FOR NEGATIV FOTORESIST INNEHALLANDE KEMISKA GRUPPER SOM KAN SJELV- ELLER SAMKONDENSERA UNDER SUR KATALYS SAMT ANVENDNING AV KOMPOSITIONEN
摘要 Composition for negative photoresist comprising a mixture of a polymeric material (A) and one or more cationic photoinitiators (B) and eventually other in photoresists commonly used components such as solvents, sensitators, etc., wherein the material A consists of a homopolymer, copolymer of a mixture of polymers where acrylamide, methacrylamide or derivatives of these is a part of at least one of the polymers present and also comprising chemical groups which can self- or cocondense with other chemical groups under acid conditions, e.g. acid catalysis, and the material B consists of one or more cationic photoinitiators which can generate acid catalysts such as Brönsteds acids or Lewis acids and use of said negative photoresist are described.
申请公布号 SE453335(B) 申请公布日期 1988.01.25
申请号 SE19860002224 申请日期 1986.05.15
申请人 AB WILH BECKER 发明人 S * GOTHE;A * HULT
分类号 C08L33/24;C08L33/26;G03F7/038;(IPC1-7):G03C1/70 主分类号 C08L33/24
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