| 摘要 |
<p>PURPOSE:The titled sheet, obtained by coating the substrate surface of a polymer containing a carboxyl group-containing compound with a self-adhesive layer, hardly causing deflection, capable of eliminating even slight deflection by irradiation and readily storable without mutual contact of self-adhesive sheets. CONSTITUTION:A sheet, obtained by coating a substrate prepared by laminating a polymer film 2, preferably containing a compound having carboxyl group as a polymer constituent unit to a general-purpose polymer film (2a), e.g. polyethylene, etc., with a self-adhesive layer 3 consisting of a self-adhesive and a radiation polymerizable compound and capable of sufficiently extending in expanding, providing sufficient interstices between chips, smoothly and surely picking up wafers.</p> |
