| 摘要 |
PURPOSE:To detect an article based on different standards at every zone at a high speed, by detecting whether the article having a repeating pattern has a flaw by optically detecting the appearance such as the shape, damage or contamination of the article. CONSTITUTION:An article 2 to be inspected is placed on a base stand 4 and positionally fixed by the abutment parts 4a, 4b of said base stand 4. An illumination light source 6 is arranged in opposed relation to the article 2 to be inspected. Objective lenses 8-1, 8-2, 8-3 and line sensors 10-1, 10-2, 10-3 being light receiving elements are arranged to cameras CA1, CA2, CA3 and the image of the article 2 to be inspected is picked up by the cameras at every plural regions overlapped with each other at the end parts thereof. Unit patterns P1-P4 are extracted from a plurality of images thus obtained and said images are compared with the same reference pattern image in parallel and the difference between both patterns is detected at every plural zones and said plural zones are judged based on different standards. |
