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发明名称
PROCESS FOR MAKING A SEMICONDUCTOR STRUCTURE
摘要
申请公布号
EP0178418(A3)
申请公布日期
1988.01.20
申请号
EP19850110384
申请日期
1985.08.20
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
HORR, ROBERT ARTHUR;MOHLER, RICK LAWRENCE
分类号
H01L21/033;H01L21/32;H01L21/76;H01L21/762;H01L21/8238;H01L27/092;(IPC1-7):H01L21/82;H01L21/00
主分类号
H01L21/033
代理机构
代理人
主权项
地址
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