| 摘要 |
PURPOSE:To prevent shift to arc discharge while inhibiting the instability of discharge generated by the overheat of a cathode by slantingly fitting a discharge section for the cathode in the direction of the downstream of a flowing gas and forming the nose section side of the discharge section, crossed at an approximately right angle with the direction of flow of the gas. CONSTITUTION:Laser beams are reflected between an output mirror 5 and a rear mirror 7 while laser beats are outputted from the output mirror 5 as shown in the arrow 19 to the right side through discharge regions as clearance sections among an anode 9 and cathodes 11. A gas as a laser medium is circulated as shown in the arrow 17 from this side. Cylindrical sections 11A are projected to the anode 9 side in each cathode 11, discharge sections 11B are tilted at an angle such as an approximately right angle to the downstream side in the direction of flow of the gas, and the nose sections 11C of the discharge sections 11B are crossed at a right angle with the direction of flow of the gas and formed to the side reverse to the anode 9. Accordingly, a laser gas, a temperature of which is elevated by discharge, flows to the downstream side, the nose sections 11C of the discharge sections 11B for the cathodes 11, but heat is transmitted over the discharge sections 11B and nose bending sections 11D to the nose sections 11C and cooled, thus preventing the overheat of the cathodes. |
