| 摘要 |
PURPOSE:To obtain a shaft seal mechanism which can withstand high degree vacuum by providing two labyrinth devices between a housing and a rotary shaft and providing oil seals and tetrafluoride ethylene resin group seal ring between both the labyrinth devices so as to contact to the rotary shaft. CONSTITUTION:A rotary shaft 8 is passed through a housing 2. A first labyrinth device 13 and a second labyrinth device 14 are provided in a shaft hole 3 and a seal device hole 4 of the through part. And the seal device hole 4 is formed between the labyrinth devices 13, 14, and two oil seals 15 and one tetrafluoride ethylene resin seal ring 17 contacted to the rotary shaft 8 are mounted thereon. By this construction, synergetic seal effect due to sequential arrangement of the first labyrinth device 13, oil seals 15, tetrafluoride ethylene resin group seal ring 17 and the second labyrinth device 14 is generated, and a shaft seal mechanism which can withstand high degree vacuum can be obtained. |
