| 摘要 |
PURPOSE:To ensure the quick measurement of the flatness, by projecting luminous flux having a light axis which is parallel with a surface to be measured on a reflecting mirror on a measuring table which is slidably provided on the surface to be measured, and detecting the reflected light. CONSTITUTION:A light projector 3 and a light receiving device 4 are set at both ends of the surface to be measured 2. The luminous flux outputted from the light projector 3 is accurately inputted to the specified position of the light receiving device 4. The light axis is made in parallel with the surface to be measured 2. The luminous flux 5 is inputted to the reflecting mirror 8 which is mounted on the measuring table that is slidably provided on the surface to be measured 2. Then, the light reflected by the arc shaped reflecting surface of the reflecting mirror 8 is inputted to a surface 7 of the measuring table. The flatness of the surface to be measured 2 is measured quickly and accurately, from the incident position of the reflected light when the measuring table 6 is moved. |
