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发明名称
MANUFACTURE OF THIN-FILM CIRCUIT
摘要
申请公布号
JPS6310526(A)
申请公布日期
1988.01.18
申请号
JP19860154072
申请日期
1986.07.02
申请人
HITACHI LTD
发明人
MORIJIRI MAKOTO;HARA SHINICHI;NARUSHIGE SHINJI;HANAZONO MASANOBU;SAITO HARUNOBU
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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