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发明名称
MANUFACTURE OF AMORPHOUS SILICON FILM
摘要
申请公布号
JPS6310518(A)
申请公布日期
1988.01.18
申请号
JP19860154185
申请日期
1986.07.02
申请人
RICOH CO LTD
发明人
OKAMOTO HIROYUKI
分类号
H01L31/0248;H01L21/205;H01L31/08
主分类号
H01L31/0248
代理机构
代理人
主权项
地址
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