| 摘要 |
PURPOSE:To increase a cutting speed as well as to make the cutting easier even against a yet harder material, by installing a diamond coat high in hardness or a carbonaceous coat in a wire for a wire saw. CONSTITUTION:Ti is coated to a piano wore by means of a spattering process, forming an intermediate layer 3, and afterward CH4, as material gas, is coated to a diamond coart 2 by an excimer laser beam CVD process, thus such a wire as in a construction shown in illustration is manufactured. If so, it is excellent in abrasion resistance and, what is more, a cutting speed is sharply increasable so that introduction of mechanical distortion into a workpiece is restrainable. In addition, since the diamond coat 2 is excellent in heat conductivity, frictional heat due to cutting is quickly eliminated. Therefore, the promotion of long service life in a wire for a wire saw can be designed, and thermal effect to the workpiece is checkable. |
