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发明名称
ION IMPLANTATION EQUIPMENT
摘要
申请公布号
JPS6310453(A)
申请公布日期
1988.01.18
申请号
JP19860154035
申请日期
1986.07.02
申请人
HITACHI LTD
发明人
YANAGIDA TAKEHIKO;YAMAZAKI TAKASHI;YASUKAWA AKIRA
分类号
H01L21/265;H01J37/317
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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