| 摘要 |
PURPOSE:To monitor film thickness for a long period even when organic or high polymer material is vapor-deposited by monitoring the laminate thickness of the vapor-deposited film formed by allowing a crystal oscillator for film thickness monitoring to contact a vapor flow successively. CONSTITUTION:While a shutter 11a and shutters 11b and 11b are closed, vapor deposition on a substrate 1 is carried out, and variation in the natural oscillation frequency of the crystal oscillator 10a is read as an electric signal to detect the amount of lamination; if the crystal oscillator 10a becomes defective in operation, the shutter 11b is opened so as to operate another crystal oscillator, i.e. 10b. This operation is repeated up to a crystal oscillator 10c. Thus, the shutters 11a, 11b, and 11c are opened to bring the vapor flow 6 into contact with the crystal oscillators 10a, 10b, and 10c in order, so that the time when the amount of lamination on the substrate is an operation of about 15X3=45 by this invention as compared with conventional 15min when the operation time of every crystal oscillator is 15min. |
