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经营范围
发明名称
PLASMA ASHER
摘要
申请公布号
JPS639937(A)
申请公布日期
1988.01.16
申请号
JP19860153516
申请日期
1986.06.30
申请人
TOSHIBA CORP
发明人
MESHIGAYA TETSUO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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