首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
SPUTTERING APPARATUS
摘要
申请公布号
HK488(A)
申请公布日期
1988.01.15
申请号
HK19880000004
申请日期
1988.01.07
申请人
HITACHI, LTD.
发明人
HIDEHARU KIYOTA;MITSUAKI HORIUCHI
分类号
C23C14/36;C23C14/35;H01J37/34;H01L21/285;H01L21/3205;(IPC1-7):C23C14/34
主分类号
C23C14/36
代理机构
代理人
主权项
地址
您可能感兴趣的专利
REGULERINGSINDRETNING TIL TEMPERATURER, TEMPERATURDIFFERENSER ELLER PAAFYLDNINGSGRADER I KOELEMIDDELKREDSLOEB
ELECTROMAGNETIC TRANSMISSION
FIELD STRUCTURE FOR LINEAR CYLINDRICAL POLYPHASE MOTOR
DEVICE FOR PROVIDING DUPLICATE FACILITIES FOR POWER SOURCES
DEVICE FOR PROTECTING STATIC FREQUENCY CONVERTER AGAINST OVERVOLTAGES
DEVICE FOR CORRECTING ERROR OF SINGLE-STEP CURRENT TRANSFORMER
APPARATUS FOR ASSEMBLING ARMATURE UNIT WITH PUSHER OF HERMETICALLY SEALED RELAY
FUSE
TRANSFORMER WITH DISC SANDWICH WINDINGS
VERSIONS OF STORAGE
DEVICE FOR CHECKING KNOWLEDGE LEVELS OF TRAINEES
RELAY OPERATIONAL AMPLIFIER
DIGITAL FUNCTION GENERATOR
DEVICE FOR TRANSFORMING BINARY CODE TO CODE OF NUMBER SYSTEM WITH NEGATIVE RADIX
D.C. STABILIZER
CONSTANT-TEMPERATURE CABINET
DEVICE FOR PROGRAM CONTROL OF TRACKING DISPLACEMENT BY DRIVING DISPLACEMENT
ELASTIC WAVE EXCITATION SOURCE
STEARINE IDENTIFICATION METHOD
METHOD OF SEPARATING OPTICAL ISOMERS OF AMINE-CONTAINING COMPOUNDS