| 摘要 |
<p>An accelerometer comprising a body (10, 16, 12), proof mass (18, 30, 32), mounting means comprising flexures (20, 22) for mounting the proof mass to the body, and force sensing means (34, 38). The flexures permit translational motion of the proof mass with respect to the body along a sensitive axis SA and rotation of the proof mass with respect to the body about a hinge axis HA that is perpendicular to the sensitive axis. Acceleration of the accelerometer along the sensitive axis results in translational motion of the proof mass along the sensitive axis. The force sensing means reacts to such translational motion by producing a signal indicative of acceleration along the sensitive axis. In a preferred embodiment, the mounting means comprises a pair of fused quartz flexures that are oppositely directed with respect to one another, and the sensing means comprises a pair of vibrating beam force transducers that are connected to the proof mass on opposite sides of the hinge axis from one another. The described assembly method for accelerometers comprises forming bridges between the proof mass and body, the bridges being removed after attachment of the force transducers.</p> |
