| 摘要 |
PURPOSE:To obtain a device capable of easily changing the irradiation range on the surface to be irradiated by a method wherein respectively specified first and second integrators, a condenser lens and a means to change the distance between the first and the second integrators are provided. CONSTITUTION:A first integrator 11 to convert an incident laser beam into divergent bundles of rays of the plural number, a second integrator 12 to form a secondary light source 13 using the divergent bundles of rays of the plural number converted according to the first integrator 11 as incident rays, a condenser lens 14 to condense the bundles of rays injected from the above mentioned secondary light source 13, and a means 16 to change the distance (t) between the above mentioned first integrator 11 and the second integrator 12 are provided. Accordingly, because the divergent angle (theta) of the bundles of rays is changed corresponding to the distance (t) between the first integrator 11 and the second integrator 12, and the bundles of rays thereof is condensed on a surface 15 to be irradiated by means of the condenser lens 14, the range of irradiation of the bundles of rays on the surface 15 to be irradiated can be changed. |
