| 摘要 |
PURPOSE:To obtain a magnet having excellent corrosion resistance and chemical resisrtance by forming a titanium compound film on the surface of a rare earth iron group magnet through a chemical vapor deposition method using a titanium halide compound, an organic titanium compound, etc. CONSTITUTION:A rare earth iron group magnet composed a sintered alloy of an Nd-Fe-B magnet is place in a plasma CVD device, and the inside of the device is evacuated. Argon gas is introduced, discharge plasma is generated by a high-frequency power supply, and the surface of he magnet is etched by sputtering to clean the surface. The inside of the device is evacuated again, the gases of N2, H2 and argon are introduced, and high-frequency power is applied to generate discharge plasma. Consequently, a film consisting of titanium nitride is formed in 1-10mum. According to the treatment, corrosion resistance and chemical resistance as the defects of the application of the rare earth iron group magnet having high performance. |
