| 摘要 |
PURPOSE:To improve an electrostrictive displacement element in its mechanical strength through augmenting bondage between an electrostrictive ceramic member and an inner electrode layer for enhanced reliability and prolonged service life by a method wherein an inner electrode is built on an electrostrictive ceramic green sheet, an electrostrictive ceramic intermediate layer is formed on the green sheet, another green sheet is placed on the intermediate layer, and then the three are solidified into one before being subjected to sintering. CONSTITUTION:In a process of manufacturing an electrostrictive displacement element wherein electrostrictive ceramic members and inner electrodes are stacked up one upon another, an inner electrode 2 is formed on an electrostrictive ceramic green sheet 1a first of all, an electrostrictive ceramic intermediate layer 3 is next formed on the inner electrode 2, a green sheet 1b is then placed on the ceramic intermediate layer 3, and the entirety is subjected to sintering. For example, an electrostrictive ceramic green sheet 1a is applied to an inner electrode 2 and is allowed to dry, a ceramic intermediate layer 3 is formed on the inner electrode 2 by application of a paste consisting of an organic solvent and ceramic powder dispersed therein, another green sheet 1b is placed on the ceramic intermediate layer 3, and the entirety is subjected to sintering as in a conventional method, for the completion of an electrostrictive displacement element. A ceramic intermediate layer 3 of this design should preferably be same in composition as the electrostrictive ceramic material constituting other portions of the element. |
