发明名称 METHOD FOR FABRICATING DEVICES IN III-V SEMICONDUCTOR SUBSTRATES AND DEVICES FORMED THEREBY
摘要 New technique for forming non-rectifying electrical contacts to III-V semiconductor materials, without the use of dopants or of an alloying procedure. In accordance with this technique, an electrical contact is formed simply by depositing a region of material e.g., 130, (onto the semiconductor material) having a composition which includes at least one metal element and at least one of three specific Group V elements, i.e., P, As, or Sb, and having a bulk electrical resistivity equal to or less than about 250 mu OMEGA -cm. Alternatively, a contact is formed by depositing nickel, or a nickel-containing material essentially free of gold and silver, and having a composition which does not include any of the three Group V elements. The nickel, or nickel-containing material, is then reacted with the substrate to form a region, e.g., 130, including a compound having a composition which includes nickel as well as one of the three Group V elements.
申请公布号 WO8800392(A1) 申请公布日期 1988.01.14
申请号 WO1987US01520 申请日期 1987.06.22
申请人 AMERICAN TELEPHONE & TELEGRAPH COMPANY 发明人 APPELBAUM, AMIRAM;ROBBINS, MURRAY
分类号 H01L33/00;H01L21/28;H01L21/285;H01L29/45;H01S5/00;H01S5/042;(IPC1-7):H01L21/285;H01L29/40 主分类号 H01L33/00
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