| 摘要 |
PURPOSE:To ensure that a discharge circuit be fully cooled for a stable discharge and that all the components constituting the discharge circuit be improved in their insulating capability for the protection of circuit elements from breakage by a method wherein the discharge circuit components arc accommodated in cooling chambers filled with an insulating liquid and the cooling chambers are linked to a cooking oil circulator positioned outside the laser head. CONSTITUTION:At least the components of a discharge circuit 9 of a laser head 1 equipped with a gas circulating section are housed in cooling chambers 18 filled with an insulating liquid, and the cooling chambers 18 are linked to a cooling oil circulator 21 positioned outside the laser head 1. For example, discharge capacitors 15 in the discharge circuit 9 are, like preliminary ionization electrodes 13 and 14, arranged in multiplicity longitudinally on both sides of main discharge electrodes 11 and 12, and the discharge capacitors 15 on both sides of the main discharge electrodes 11 and 12 are respectively accommodated in cooling chambers 18. The two cooling chambers 18 are linked to a cooling oil circulator 21 though the intermediary of pipes 19 and 20 wherein the coolant reciprocates. The cooling oil circulator 21 houses a pump and cooler. |
