| 摘要 |
PURPOSE:To improve the oscillation efficiency by preventing the deterioration in laser output due to dust etc. from occurring by a method wherein laser gas is circulated from one main discharge electrode side provided with spare ionization electrodes to the other main discharge electrode in parallel with the main discharge direction. CONSTITUTION:Laser gas jetted from a vortex type blower 12 through the intermediary of a feeding duct passing through a reservoir 5a from a slit 6b is jetted between the first and the second main discharge electrodes as shown by arrows. On the other hand, deteriorated gas by laser oscillation returns to a gas circulating system 2 again through an exhaust duct 3b. Any metallic dust produced by sputtering phenomenon near the first main discharge electrode, i.e., anode side and spare ionization electrodes 9 is efficiently discharged through the intermediary of a slit 7a arranged on the surface of the first main discharge electrode. Through these procedures, the deterioration in the laser oscillation efficiency by pollution of discharge part i.e. the deterioration in laser output can be prevented from occurring. |
