Process for improving the adhesion of non-polar photoresists to polar substrates.

摘要

A process for increasing the adhesion of a non-polar photoresist to a polar substrate where the substrate is contacted with an aqueous solution of a hydrolyzed non-polar organosilane initially containing alkoxy functionality, whereafter the substrate is coated with the non-polar photoresist. Polystyrenebased photoresists are preferred.