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发明名称
VERFAHREN UND EINRICHTUNG ZUR PRUEFUNG VON DRAHTBONDKONTAKTEN
摘要
申请公布号
DD253325(A1)
申请公布日期
1988.01.13
申请号
DD19860295040
申请日期
1986.10.06
申请人
VEB BARKAS-WERKE KARL-MARX-STADT,DD
发明人
HOCHE,WOLFGANG,DD;ZEHE,ALFRED,DD
分类号
H01L21/60;H01L21/66;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
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