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发明名称
VAPOR PHASE FILM FORMING DEVICE
摘要
申请公布号
JPS637377(A)
申请公布日期
1988.01.13
申请号
JP19860153417
申请日期
1986.06.28
申请人
SHIMADZU CORP
发明人
OKADA SHIGENOBU
分类号
H01L21/285;C23C16/50;C23C16/511;G02B1/10;H01L21/203
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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