Mist supplying device for forming thin film.

摘要

A mist supplying device for supplying a film-forming solution to form a thin film on a substrate includes a nozzle (16) having an elongate outlet port (17), an atomizer (14) coupled to the nozzle (16) for atomizing the film-forming solution, and a disperser (20) movably disposed in the nozzle (16) between the outlet port (17) and the atomizer (14) and having a plurality of substantially uniformly distributed mist passages (21) for passing the atomized film-forming solution in a first flow passage direction therethrough. An air blower (15) is coupled to the atomizer (14) for delivering the atomized film-forming solution into the nozzle (16). A driver unit is coupled to the disperser (20) for reciprocally moving the mist passages (21) in a second flow passage direction transverse to the first flow passage direction.