| 摘要 |
PURPOSE:To prevent air pollution from a blower to a laser gas circulating system by making the envelope of a motor for the blower an airtight structure and connecting the envelope and a driving chamber on the side of the input shaft of the blower via a static seal structure. CONSTITUTION:The envelope 20 of a motor 19 for driving a blower 15 is made an airtight structure, and the envelope 20 of the motor 19 and a driving chamber 9b on the side of the input shaft 16 of the blower 15 are connected with each other by using a seal 23. By such a constitution, the blower 15 and the rotating portion of the motor 19 for driving the blower 15 are not exposed to atmosphere and air does not enter the driving chamber 9b even at a reduced pressure by evacuation. Accordingly, air pollution from the blower 15 to a laser gas circulating system can be prevented. |
