| 摘要 |
PURPOSE:To remove elements unstable in operation to stabilize transferring wafers, by taking in and out the wafers while the openings in wafer carriers for taking in and out wafers are turned downward. CONSTITUTION:while openings for taking in and out wafers in wafer carriers C1, C2 are turned downward in a carrier-rotation mechanism 10, the wafers W are timely prevented from sliding from the wafer-carriers C1, C2 by means of a wafer-supporting mechanism 20. A wafer carriage mechanism 30 is then positioned under the wafer carriers C1, C2 whose openings for taking in and out wafers are turned downward, and the wafers W are inserted into the wafer- holding part 32 by using their own weight, from one wafer carrier. Successively, the wafer-holding part 32 is moved to be positioned under another wafer carrier whose opening for taking in and out wafers is turned downward, and then the wafers W are pushed up from the wafer-holding part and housed in another wafer carrier. |
