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发明名称
MOLECULAR BEAM CRYSTAL GROWTH APPARATUS
摘要
申请公布号
JPS636830(A)
申请公布日期
1988.01.12
申请号
JP19860148285
申请日期
1986.06.26
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
SAITO JUNJI
分类号
H01L21/203;C30B23/08;H01L21/26
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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