发明名称 COMPLEMENTARY MOS TYPE SEMICONDUCTOR DEVICE
摘要 PURPOSE:To enhance integration by a method wherein a trench is formed between two lateral channel regions, channel regions are formed on the sides of the trench, and a P-channel MOS transistor and N-channel MOS transistor are respectively provided with a plurality of channel regions. CONSTITUTION:Two lateral channels regions 2 and 4 are formed on a semiconductor substrate 1 and a trench 6 is provided between the two lateral channel regions 2 and 4, and channel regions 7 and 8 are formed on the sides of the trench 6, for a P-channel MOS transistor 3 and N-channel MOS transistor 5 to be provided respectively with a plurality of channel regions. In this way, a device of a certain current capacity may be constructed occupying an area smaller than in a conventional design, or a device of an enhanced current capacity may be constructed occupying the same area as in a conventional design, which enables integration to be enhanced.
申请公布号 JPS635554(A) 申请公布日期 1988.01.11
申请号 JP19860149002 申请日期 1986.06.25
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 OKA NAOMASA
分类号 H01L21/8238;H01L27/092;H01L29/78 主分类号 H01L21/8238
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