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发明名称
DRY ETCHING
摘要
申请公布号
JPS635530(A)
申请公布日期
1988.01.11
申请号
JP19860148958
申请日期
1986.06.25
申请人
DAINIPPON PRINTING CO LTD
发明人
TAKAHASHI YOICHI;NAKADA TOMIHIRO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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