MICROWAVE PLASMA GENERATING DEVICE,申请号JP19860148722-传众专利搜索

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发明名称	MICROWAVE PLASMA GENERATING DEVICE
摘要
申请公布号	JPS635525(A)	申请公布日期	1988.01.11
申请号	JP19860148722	申请日期	1986.06.25
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	ITO TATSUO;TANNO MASUO;MIZUGUCHI SHINICHI
分类号	H01L21/205;H01L21/302;H01L21/3065	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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