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发明名称
WASHER FOR SMALL-SIZED PART
摘要
申请公布号
JPS634890(A)
申请公布日期
1988.01.09
申请号
JP19860146934
申请日期
1986.06.25
申请人
HITACHI LTD
发明人
FUJIKURA SEIJI;AKIBA ISAMU;OGOSHI TOMOYOSHI
分类号
B08B7/04;H01L21/304
主分类号
B08B7/04
代理机构
代理人
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