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发明名称
METHOD AND APPARATUS FOR SURFACE TREATMENT
摘要
申请公布号
JPS634618(A)
申请公布日期
1988.01.09
申请号
JP19860146879
申请日期
1986.06.25
申请人
HITACHI LTD
发明人
KAWAI NAOYUKI;MIYAZAKI MASARU
分类号
H01L21/302;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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