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发明名称
BUMPLESS FILM CARRIER
摘要
申请公布号
JPS634633(A)
申请公布日期
1988.01.09
申请号
JP19860146893
申请日期
1986.06.25
申请人
HITACHI LTD
发明人
WAKASHIMA YOSHIAKI;NARAHARA TOSHIKAZU;SERIZAWA KOJI;KAWAGOE HIROHITO
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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