| 摘要 |
Laser source roughness meter for the inspection of defects in surface microgeometry, in particular on mechanical components. The invention is noteworthy because of the combination of a coherent light source 4 arranged laterally to the analysis axis 7, illuminating the surface to be analysed from the front over an elemental measurement zone 2, through a semi-reflecting mirror 6, of a converging optical device 10, forming in its focal plane the optical Fourier transform of the reflected, diffracted and scattered beam, and of a computerised unit 12 for image acquisition, analysis and digital processing, using a flat detecting grating 11. This invention is of interest to manufacturers of optical measurement and inspection apparatuses, as well as machine tool manufacturers. <IMAGE>
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