| 摘要 |
PURPOSE:To maintain glow discharge required for laser oscillation stably by making the flow velocity of a gas laser medium at both end sections as the optical resonator side of a discharge electrode larger than a central section in a drift type gas laser oscillator. CONSTITUTION:The distribution of the flow velocity of a gas laser medium in a discharge section between discharge electrodes is equalized, and the intervals of arrangement of axial fans 5a or 5f as blowers 5 for removing the inhibition factors of glow discharge are not made uniform and are reduced toward approach to the optical resonator 9a, 9b sides. Since the flow velocity of the gas laser medium to both end sections of the electrodes in the axial direction of resonance is increased, the shortage of the flow rate at both end sections is eliminated, arc discharge is reduced remarkably and glow discharge is acquired stably, and a stable laser output is obtained while the deterioration of a main discharge electrode and a pre-discharge electrode fitted near the main discharge electrode is minimized by the decrease of arc discharge, thus lengthening the life of a device. |
