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发明名称
EVALUATION OF SEALING RESIN
摘要
申请公布号
JPS632339(A)
申请公布日期
1988.01.07
申请号
JP19860145920
申请日期
1986.06.20
申请人
MATSUSHITA ELECTRIC WORKS LTD
发明人
KATO KAORU;ARAKAWA MASAO
分类号
H01L21/56;G01N27/20;H01L21/66
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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