CROSS-LINKED POLYALKENYL PHENOL BASED PHOTORESIST COMPOSITIONS,申请号EP19860105007-传众专利搜索

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发明名称	CROSS-LINKED POLYALKENYL PHENOL BASED PHOTORESIST COMPOSITIONS
摘要
申请公布号	EP0202458(A3)	申请公布日期	1988.01.07
申请号	EP19860105007	申请日期	1986.04.11
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	GRECO, STEPHEN EDWARD;GREEN, DENNIS CLINTON
分类号	C08F12/00;C08F12/34;G03F7/023;G03F7/028;G03F7/038;H01L21/027;(IPC1-7):G03F7/08;G03F7/10	主分类号	C08F12/00
代理机构		代理人
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