| 摘要 |
PURPOSE:To enhance sensitivity, to improve developability, and to enable resolution of a <=1mum resist pattern by using a specified novolak resin obtained by condensing mixed cresols containing m-cresol and p-cresol with a carbonyl compound as an alkali-soluble novolak resin. CONSTITUTION:The desired resin composition is composed of 1,2-quinonediazide compound and the alkali-soluble novolak resin obtained by condensing the mixed cresols containing 30-70mol% m-cresol and 70-30mol% p-cresol with the carbonyl compound. This novolak resin has a/b=0.4-1.5 and c/b=0.4-2, where each of a, b, and c is the maximum height in the molecular weight range of 6,300-25,000, 2,500-6,000, and 150-900, respectively, and these molecular weights are those calculated in terms of polystyrene obtained by the gel permeation chromatography method using the monodispersion polystyrene as the standard. |
