| 摘要 |
<p>Wafers stocked in a first wafer carrier (C2) are transferred to a second wafer carrier (C1) by way of a first opening and a second opening provided respectively in the first and the second wafer carriers, and by way of a mobile wafer holder (31). Initially, the wafer carriers (C1, C2) hold the wafers (W) horizontal, with their openings facing sideways. The carriers (C1, C2) are then turned so that the first and second openings are directed downward with the wafers vertical. The wafers (W) in the first wafer carrier (C1) are then received and supported by a wafer supporter (33) provided in the wafer holder (31) and installed in the wafer holder (31) by moving down the supporter (33) from the now downward facing first opening through an upward facing third opening of the wafer holder. With the wafers installed the wafer holder (31) is shifted until the third opening confronts the downward facing second opening. The wafers held in the wafer holder (31) are transferred to the second wafer carrier by moving the wafer supporter (33) upwards, then the second wafer carrier (C2) is turned so that the second opening again faces sideways, and wafer transference is completed.</p> |
